Middle East Technical University · Center for Solar Energy Research and Applications
Article
Development of a selective wet-chemical etchant for precise 3D sculpting of silicon enabled by infrared non-linear laser modification
Mona Zolfaghari Borra, Behrad Radfar, Dr. Hisham NASSER, Tahir Çolakoğlu, Onur Tokel, Ahmet Turnalı, Merve Demirtaş, Dilek Işık Taşgın, Hande Üstünel, Daniele Toffoli, Fatih Ömer İlday, Prof. Dr. Raşit TURAN, Ihor Pavlov, Prof. Dr. Alpan BEK
Optics and Laser Technology
10 April 2024 · doi:10.1016/j.optlastec.2024.111022