Middle East Technical University · Center for Solar Energy Research and Applications

Conference paper

Al2O3/SiNx stacks with ozone-based ALD Al2O3 for surface passivation: Superior layer stability after firing

Elif Sarıgül Duman, Armin Richter, Christian Reichel, Jens Fittkau, Christiane Le Tiec, Anamaria Moldovan, Jan Benick

11th International Conference on Crystalline Silicon Photovoltaics (SiliconPV)

26 October 2022 · doi:10.1063/5.0090639