Development of a selective wet-chemical etchant for precise 3D sculpting of silicon enabled by infrared non-linear laser modification

Mona Zolfaghari Borra, Behrad Radfar, Dr. Hisham NASSER, Tahir Çolakoğlu, Onur Tokel, Ahmet Turnalı, Merve Demirtaş, Dilek Işık Taşgın, Hande Üstünel, Daniele Toffoli, Fatih Ömer İlday, Prof. Dr. Raşit TURAN, Ihor Pavlov, Prof. Dr. Alpan BEK

Optics and Laser Technology

10 Nisan 2024 · doi:10.1016/j.optlastec.2024.111022